William G. Oldham
During his 40 year tenure as a professor in the Electrical Engineering and Computer Science Department at the University of California at Berkeley, Dr. William Oldham became a recognized leader in the field of integrated circuit (IC) miniaturization technology. He pioneered the definition and development of practical simulators for micropatterning, including deposition, etching and lithography. His invention of sealed-interface local oxidation significantly reduced the formation of bird's beak in the local oxidation process, improving device performance. His recent work on maskless lithography is expected to bring improvements in chip development and the customized manufacture of specialized chips in limited quantities.
Dr. Oldham is professor emeritus and Robert S. Pepper Distinguished Professor of Electrical Engineering at the university. An IEEE Fellow, he has served on the IEEE Electron Devices Society Administrative Committee and is a member of the U.S. National Academy of Engineering.